Download [BS en ISO 14644-14] -- Cleanrooms and Associated Controlled Environments. Part 14. Assessment of Suitability for Use of Equipment by Airborne Particle Concentration PDF

Title[BS en ISO 14644-14] -- Cleanrooms and Associated Controlled Environments. Part 14. Assessment of Suitability for Use of Equipment by Airborne Particle Concentration
Tags Nature
File Size859.6 KB
Total Pages27
Document Text Contents
Page 13

6.2.6
 Approximate

identification of HPC

locations

Have significant
equipment operational

parameter or set up

errors been

identified ?

6.2.7
Precise determination

of HPC locations

6.2.9
Data

processing

NO

YES

Parameters optimised or
issues resolved?

YES

6.2.8
Suitability

measurements

6.2.3

Representative mode

of operation

7.0
Documentation

6.2.2

Requirements and

considerations

6.2.4

 Assessment of test

environment

6.2.5

Determination of the

test environment

6.2.10

Reference to
ISO 14644-1

classification system

NO

8.0
Statement on

cleanroom suitability

Figure 1 — Overview of the assessment procedure

10 © ISO 2014 – All rights reserved

Similer Documents